THE PREPARATION AND CHARACTERISTICS STUDY OF TiNxOy SPECTRAL SELECTIVE ABSORBING FILM BY MAGNETRON SPUTTERING

Spectral selective absorbent film is a crucial factor for the solar heating devi ce. There are many kinds of spectral selective absorbing film made by different ways. TiNxOy thin film with excellent spectral selecting absobent property were successfully prepared by DC magnetron sputtering with Ar as working gas, N2 and O2 as reactive gas, 99.9% titanium as the target and is copper slice as the subs trate. In this article, the optical characteristics and microstructure of TiNxO y thin film were studied. Inputing O2 can decrease the reflection of the visible lights, and double layer film can get good absorption for solar energy.