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STUDY ON THE TANTALIZING ON THE SURFACE OF TITANIUM ALLOY BY NET-SHAPE CATHODE GLOW DISCHARGING

Keywords: TC4 (Ti6Al4V),cathode sputtering,tantalizing
钛铝钒合金
,阴极溅射,辉光放电,氮化氘,SEM

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Abstract:

A new net-shape cathode sputtering target which has a simple structure and a hig h sputtering was put forward. The multiple-structure made of alloying and coatin g layers of tantalum was achieved on the surface of TC4 (Ti6Al4V) using this met hod in double glow surface alloying process. The tantalized samples were investi gated by SEM, XRD and electrochemical corrosion method .Results show the complic ated tissue of pure tantalizing layer and diffusion layer was successfully forme d on the surface of TC4 with the method of net-shape cathode glow discharge, whi ch further improved the corrosion-resistance of TC4 and formed good corrosion-re sistant alloys.

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