STRUCTURE OF SPUTTERED Co-Cr-Al-Y COATING

The phase composition of Co-30Cr-6Al-0.5Y coating deposited by planar magnetronsputtering as well as the effect of sputtering parameters on it have been investigated.Thesputtered coating is composed of hep ε-phase of fcc α-phase of Co solid solution with a mi-nority of β-CoAl intermetallic phase.The hcp ε-Co phase and the fcc χ-Co phase assumed a<100>and <110>preferred orientation respectively.Both the phase type and orientationextent depend on the sputtering parameters.If the substrate surface is parallel to the targetface during sputtering,the coating will be of fine crystallite with compact structure andsmooth surface;if it is rotated,the coating will be to the contrary.