EFFECT OF Ti ON MICROSTRUCTURE OF STEEL 321 FILM SYNTHESIZED BY MAGNETRON SPUTTERING DEPOSITION

Effect of increasing content of Ti on the crystalline-to-amorphous transition in alloy filmof stainless steel 321 plus Ti synthesized by high rate magnetron sputtering deposition isreported.X-ray diffraction analysis revealed that the microstructure of film was sequentlychanged from α-Fe,α-Fe-X-phase,microcrystalline+amorphous into amorphous withincreasing content of Ti fiom 0—3,3—10,10—18 and 18—30 wt-% respectively.