Analysis and Calculation of Forces on Macroparticles in Plasma Sheath
大颗粒在等离子体鞘层中的受力分析与计算

Applying the plasma sheath models given by Edlberg and Aydil, the charging effect and forces acting on macr opart icles are analyzed and calculated in pulsed-bias arc ion plating, which gives an evidence to the experimental phenomenon and physical model in which macroparticles would be repulsed from electric force and hence are significantly reduced.