Effects of Al2O3 and Cr Interlayers on the Optical Property and Adhesion of Ag Film
Al2O3和Cr过渡层对Ag膜光学性质及其附着力的影响

Properties of Ag film deposited on BK7 glass substrate with Al_2O_3 and Cr intermediate layers were investigated by using spectrophotometer,XRD,AES and adhesion test.The results showed that the effect of Al_2O_3 interlayer on the reflectivity of Ag film is smaller compared with Cr interlayer. And with increasing Al_2O_3 interlayer thickness,the reflectivity of Ag fihn increased firstly and then decreased.On the other hand,introducing Al_2O_3 and Cr interlayers,the Ag grains are refined and the(111)texture of Ag film are weakened due to the diffusion of aluminum and Cr atoms to the growth face,thus resulting in the decrease of reflectivity of Ag film.Grain refining could improve the virtual contacting area between Ag film and substrate during depositing initiation.Alumina interlayer enhanced the adhesion between Ag film and glass substrate,which attributed to more Al atoms diffusing to the Ag film than Cr atoms.