EFFECTS OF SPUTTERING PARAMETER ON THE MICROSTRUCTURE OF Ti--6Al--4V COATING ON SiC FIBRE
溅射参量对SiC涂层Ti-6Al-4V显微组织的影响

The effects of sputtering parameters on the microstructure of Ti-6Al-4V coating on SiC(f) prepared by magnetron sputtering were studied. The results show that the deposition rate is related to the working pressure at a given power density. The morphology of the deposited layer and its binding with the fibre are dependent on temperature. The composition of the coat is close to Ti-6Al-4V, and is uniform throughout the thickness of the coat. The deposited layer consists of crystallites with nonequilibrium hep structure with grain size of 20-50 nm. The interface between SiC fibre and Ti-6Al-4V coating was investigated by scanning electron microcopy and energy dispersive X-ray spectroscopy. The examination reveals no chemical reaction at the fibre-coat interface which is in nature a sharp interface formed by bonding of the two substances.