EFFECT OF LOADING RATE ON NANOINDENTATION CREEP PROPERTIES OF Al FILMS
加载速率对Al膜纳米压入蠕变性能的影响

Constant loading rate/load creep experiments were conducted on polycrystalline Al thin films using nanoindentation instrument. The results indicated that the loading mode has an obvious effect on the creep properties. With increasing loading rate/load, total creep and stress exponent of the film were increased. The high creep rate in an initial loading stage was considered the result of the release of plastic deformation, which should have taken place in the loading of previous segment. It follows that the change of total creep and stress exponent of tested films depends sometimes on the amount of plastic deformation under different loading conditions.