A Novel Method for Determining the Residual Stresses of Hard Coatings
一种测量硬质薄膜残余应力的新方法

A new method was put forward to determine the residual stresses of hard coatings. A set of optical lever system was designed to measure accurately the curvature of the sample bended by the stresses of the films, and then the residual stress can be calculated. Through detecting the error of the measuring equipment and testing the residual stresses in (Ti,Al)N films deposited using by arc ion plating, the effectiveness of the method was exhibited.