AN EPMA SOFTWARE FOR DETERMINATION OF THIN METAL FILM THICKNESS AND IT''S APPLICATION
薄膜厚度的电子探针测量软件与应用

A software for determinating the thickness of thin metal film with EPMA was developed on the bass of Sewell's formula. It is based physically on that the exciting depth of X-ray decreased as the accelerate voltage of incident electron lowered. When the exciting depth is equal to the film depth, the ratio of X-ray intensities from film and bulk standard is unity. The thicknesses of several thin metal films of pure elements on Si and Al substrates were determined by this method, and the relative error of mass thickness is smaller than 1.6%.The minimum mass thicknesses for various elements, which can be measured, were also obtained.