MICROSTRUCTURE AND MAGNETIC PROPERLY OF Fe_x(In_2O_3)_(1-x) MAGNETIC GRANULAR FILMS
Fex（In2O3）1—x磁性颗粒膜的微结构与磁性

Metal/semiconductor Fex (In2O3)1-x granular films were prepared by the rfsputtering. The microstructure was studied by using XRD, TEM and magnetic measurements.The results showed that the nanometer-sized Fe particles uniformly dispersed in the amorphousIn2O3. Appropriate annealing leads to the crystallization of In2O3 films and the growth of theFe particle size. As a result, the magnetic behavior of the films transits from superparamagneticto ferromagnetic. The variation of the lattice constant for In2O3 depends on the volume fractionof Fe particles.