EVALUATION OF ADHESION AND PLASTICITY OF PVD FILMS
PVD薄膜的粘附性和塑韧性评估

Evaluation of adhesion of PVD Ti and TiN films on A_3 steel was carried out by a newly developed method, so called constant rate pulling test (CRPT) at 0.05mm/min, under SEM observation simultaneously. As the criterion, the critical cracking or spalling elongation of the film/substrate system on the one-sided polishing notched tensile specimen may be de- termined, respectively, to evaluate the plasticity and adherence of the film to substrate. The conventional scratch test was also made for evaluation of the adhesion of films of the same sys- tems. Both give the coordinate assessment for all of the systems. In addition, the influence of adhesion of the films to the substrate on ultimate YS of substrate material was discussed and another criterion for adhesion assessment was proposed.