Research on Laser Welding Technology of Infrared Detector Assembly
红外探测器组件激光封口技术研究

Highly hermetical laser sealing is a packaging technology which can be used for metal packages. It can achieve the sealing of a small hole of the metal package containing an infrared detector in a high vacuum environment. Thus, both the exhaust process and the sealing process of the infrared detector assembly can be finished at the same time. According to the structure and material of a micro package, the relation of the current and pulse width of a laser welding equipment to welding energy and the influence of the current, pulse width and defocusing distance on welding quality are analyzed. Proper laser welding parameters are obtained for Kovar materials. With those parameters, the laser sealing of a hole of the metal package containing an infrared detector is achieved. The test result shows that its leak rate is better than 1×10-10Torr.l/S.