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红外  2007 

Study of the Optical Characteristics of TiO2/SiO2 Nanomultilayers
TiO2/SiO2纳米多层膜光学特性研究

Keywords: magnetron sputtering,nanomultilayers,optical characteristics
磁控溅射
,纳米多层膜,光学特性

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Abstract:

TiO2/SiO2 nanomultilayers were prepared on glass substrates with magnetron sputtering. The thickness and refractive index of the thin films were measured by an ellipsometer. The blackbody radiation experiment shows that the TiO2/SiO2 nanomultilayers have good infrared absorption within the wavelength range of 800nm - 1400nm, and the absorption coefficient increases as the temperature rises. The infrared spectroscopy shows that the TiO2/SiO2 nanomultilayers have good infrared absorption within the wavenumber range of 2300cm^-1 , 2900cm^-1.

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