New method for determination of arsenic contentin tail gases during semiconductor processing

A new method for determination of arsenic content in tail gases during semiconductor processingwas proposed. Arsenic compounds of various forms including gaseous, liquid and solid form are reduced byhydrogen at high temperature and analyzed by gas chromatography. Two sampling methods , i. e. sampling bylow temperature concentration and sampling by solution absorption were introduced. The analytical rnethod israpid , sensitive and reliable comparing with other methods.