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SPATIAL RESOLUTION OF ELECTROOPTIC SAMPLING WITH BACK-DIRECT SAMPLING STRUCTURE
背面直接取样结构电光取样的空间分辨率

Keywords: spatial resolution,electrooptic sampling,Gaussian distribution
空间分辨率
,电光取样,高斯分布,背面直接取样结构,测量,电光晶体,集成电路,光斑

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Abstract:

The principle and method for measuring the spatial resolution of electrooptic sampling systems were introduced. According to the experimental results, the spatial resolution of the electrooptic sampling instrument established by the authors is 3μm.

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