STUDY OF FABRICATION OF 16-CHANNEL MICRO INTEGRATED FILTER
16通道微型集成滤光片制备技术的研究

Multi-spectrum imaging system is tending to become smaller,more integrated,lighter and more spectrum channels,and spectrum-dividing multi-channel filter is one of critical elements of the system.A new effective technology is needed to meet the requirement.A new method named combined etching technology was presented here by adjusting the thickness of space layer of F-P filter.Traditional coating technology was combined with ion etching and masking technique to fabricate multi-channel integrated filters.A 16-channel micro integrated narrow band pass filter was fabricated within a small size substrate,whose feature size of unit filter width is 0.7mm,relative half width of peak transmission is less than 1.0%,and peak position location accuracy is beneath 0.25%.This method not only meets the requirement of integrating more filters,but also develops the fabrication technology of thin film.