DEVELOPMENT OF HIGH T c SUPERCONDUCTING IR DETECTORS WITH SUB MICROMETER STRUCTURE
亚微米结构高Tc超导探测器研制

Keywords: infrared detector,synchronons radiation,high,T,c,superconducting device
红外探测器,超导器件,YBCO,高Tc,亚微米

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Abstract:

应用同步辐射技术对ＹＢＣＯ超导薄膜进行光刻，获得０．８μｍ间隔的折线结构，研制成亚微米结构高Ｔｃ超导薄膜红外探测器，敏感元接收红外辐射能量提高约４２％．器件的最好探测率Ｄ＊达到１．８×１０１０ｃｍＨ１／２ＺＷ－１，工作温度约９０Ｋ．

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