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红外与毫米波学报 1993
STUDY OF ELECTRODE BONDING DAMAGE OF GaAs/AlGaAs MULTIPLE QUANTUM WELL INFRARED DETECTOR
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Abstract:
The pressure distribution, pressure damage radius and the depth in bonding, and the damage in ultrasonic bonding are discussed with the cylinder flow model. Besides, the ultrasonic bonding damage mechanism and the force damage of Au wire in indium ball melt-bonding technique of GaAs/AlGaAs multiple quantum well detector are also discussed in this article.