A STUDY ON THE PHOTOSENSITIZATION OF MODIFIED POLY (GLYCIDYL METHACRYLATE)
聚甲基丙烯酸环氧丙酯的改性及其光敏性能的研究

A Series of PGC was obtained by esterification of poly-(glycidyl methacrylate) (PGMA) with einnamic acid. NMR was used to determine the degree of esterification. The content of cross-linking under irradiation was quantitatively measured by UV, and confirmed by the gel-content test. It is foumd that the introduction of einnamic acid greatly increases the sensitivity to the dfarp UV. Thus, PGC is a highly enough sensitive negative resist without adding any sensitizer.