Fabricating Micro-grating Structures on Nickel Using Interference Laser
镍金属表面双光束激光干涉直写研究

A method of etching Micro-Grating Structures (MGSs) by ablating nickel plate was studied,which makes use of the interference laser of 351 nm diode-pumped solid-state laser pulses.Through changing the experimental parameters such as laser power,number of laser pulses,the influences of these parameters on the depth of grooves and diffraction efficiency of MGSs were analyzed.The depth of MGSs is 1.25 μm,and the period of MGSs varies from 10 nm to 280 nm that measured with Scanning Electron Microscope (SEM) and Atomic Force Microscopy (AFM).When the laser power is 1.2 mJ and number of laser pulses are 10 pulses,the deeppest depth of MGSs is 280 nm and the first-order diffraction efficiency of the MGSs is18%.With the help of the diffraction theory grating,the influences on diffraction efficiency of MGSs were discussed.It extends the application of nanosecond laser in laser-induced microstructures,and provides a new method for micromachining reflection grating in metal.