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光子学报  2008 

Nonlinearity of CCD and Its Adjustment
CCD非线性及其校正研究

Keywords: 傅里叶变换轮廓术,CCD非线性,校正方法,γ级频谱

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Abstract:

The reason for the nonlinearity of CCD was analyzed.and then a method to adjust the nonlinearity was introduced.Finally ,the simple analytical deduction and physical explain were given.After adjusting the nonlinearity of the CCD,the standard error of the shape for the object becomes 0.025 2 mm while it was 0.040 7 mm without adjusting.The result shows that,the standard error and the step spectrum and decrease obviously,and the shape for the object is superior to that without adjusting.

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