Dynamic Phase-shifting Interferometry for Full Field Retardation Distributing of Quarter Wave Plate
1/4波片相位延迟分布的动态测量

The measurement model for the retardation distributing of the quarter wave plate was introduced by Muller matrix and Stokes parameter.And four patterns with phase shifting of 90°in turn were catched simultaneously by an especial spatial splitting phase-shifter.Therefore,the introduced system has anti-vibration performance and the dynamic testing on line may be performed.An actual measurement of a quarter wave plate which wavelength is 632.8 nm was given out finally.Its averaging retardation was 149.36 nm,and there is about 75% of the testing area whose retardation error is less than 5 nm.So it had fine retardation uniformity.