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光子学报  2005 

Technical Modeling of X-cut H:LiNbO3 Optical Waveguides
X切H:LiNbO3光波导的工艺仿真研究

Keywords: LiNbO3,Optical waveguide,Proton-exchange,Annealing
铌酸锂
,光波导,质子交换,退火

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Abstract:

Technical modeling of x-cut H∶LiNbO_3 optical waveguides is researched by prism coupler at the wavelength of 532 nm and 1310 nm.For optical waveguides proton-exchanged in pure benzoic acid at 150℃,180℃ and 200℃, relationships between exchanged thickness and exchanged time are given, respectively,and on this base,a relation curve of diffussion coefficient of proton-exchange to exchanged temperature is plotted.For the waveguides proton-exchanged at 180℃ and annealed at 350℃,the changes of surface refractive index increment and effective thichness with annealing time are obtained.The results can be used to design and fabricate the low loss α phase single mode waveguides.

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