Signal Processing Analysis of Grating Moving Light Modulator Based on MEMS
基于MEMS光栅平动式光调制器信号处理分析

Fourier optics is adopted to analyze the distribution in the imaging plane,using two different filters in frequency spectrum plane.The analysis indicates that collecting 1st order spectrum can get even dark field,but uneven bright field according to the influence of frame and crab-cantilevers,and collecting 0th order spectrum can not only get uneven dark field,but also uneven bright field.In order to get higher even brightness field in imaging field, grating period should be double grating width and reduce the frame and crab-cantilevers size.