Misalignment Error Anglysis in Laser Interference Length Measurement
激光干涉测长未对准误差分析

Based on analysis of laser interference length measurement principle, optical path offset model and length of optical path in cube-corner prism model are given, and a simple expression of influence relationship of misalignment error and positioning error is derived with neglecting of straightness errors and angle errors. Positioning errors measurement experiments are carried out and a quantitative estimation method for misalignment error is given.