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光子学报  2008 

Measurement of Homogeneity of Optical Glass with Parallel Surfaces Using Low Coherence Light Sources
用短相干光源测量平行平板玻璃的光学均匀性

Keywords: Measurement and metrology,Homogeneity,Low coherence light,Virtual grating phase-shifting Moire fringe method
光学精密测量
,光学均匀性,短相干光,虚光栅移相莫尔条纹法

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Abstract:

In order to solve the problem that the traditional interferometric absolute method can not test the homogeneity of optical glass and crystal with parallel surfaces,a low coherence light source was used on the Twyman-Green interferometer.Both the front and the rear surface of the tested sample were placed close to the zero-OPD position by adjusting the optical path of the reference arm.The lights reflected from the two surfaces were not interfering with the reference light simultaneously.So the lights reflec...

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