Optical Constants and Microstructure of the Zns Film by RF Sputtering
溅射条件对ZnS薄膜的光学常量和微结构的影响

ZnS films were deposited on the float glass for researching the effect on the optical constants and microstructure of film by the sputtering conditions.The deposition conditions were changed from the respect of pressure,power and temperature of substrate.The spectral transmittance and reflectance were measured in the range of 300~2 500 nm by using a spectrometer.From the spectrum,the optical constants and the band gap were calculated.The change of the film microstructure with the substrate temperature was analyzed by the X diffraction method.The result shows that there are little difference in the optical constants and microstructure of samples sputtered by different sputtering conditions.