Study on Optical Centering of Aspheric Mirror by Interferometry
非球面干涉定心方法研究

The vertex off-centering error and curvature center off-centering error are defined according to the unique optical axis of aspheric mirror. Error budget estimation about conventional centering method shows that it cannot be used to control the vertex off-centering error,so interferometric method was suggested.After some theory and simulation are discussed,it shows that there is linearity relationship between the vertex off-centering error and the off-centering coma, and that the sensitivity of the linearity is in proportion to the aspheric gradient of the surface,so the interferometric method can control the two off-centering error of aspheric optic with an accuracy about 0.02 mm.