A Self-reference Method for Measuring Hartmann-Shack Wavefront Sensor Parameter
Hartmann-Shack传感器结构参量的自基准标定

A new method is proposed to measure the parameter of Hartmann-Shack wavefront sensor.It was based on the Zernike polynomial modal reconstruction algorithm,and can be used to obtain the distance between micro-lens array and the CCD accurately.It obviously reduces the error caused by the slope calculation using micro-lens focus instead of actual parameter.Through this way,the requirement of sensor assembly-precision is reduced,and the detection accuracy of Hartmann-Shack sensor is also improved in the meanwhi...