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光子学报 2009
Aberration Correction Using MEMS-DM
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Abstract:
A micromachined membrane deformable mirror(MEMS-DM) was used to correct the geometrical aberrations at any particular field angle in simple system.The experiment results show that the MEMS-DM can be programmmed to correct all the geometrical aberrations in field-of-view(FOV) and creates a variation in the image quality across the entire FOV.The region of interest can be changed dynamically,so any area within the FOV of the system can be highly resolved within milliseconds.