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光子学报 2006
Imaging Research with Non-periodic Multilayers
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Abstract:
A grazing KB microscope was designed for hard X-ray (8 keV; Cu Ka radiation) imaging in ICF diagnostic experiments. Ray tracing software (ZEMAX) is used to simulate optical system performance. The best theoretical resolution of KB microscope is about 2 micron and better than 10 micron in 200 micron field of view. W/B4C supermirror was deposited on the Si wafer substrate and the reflectivity was measured by X-ray diffraction instrument (XRD). The reflectivity of supermirror is about 20% in 0.3°bandwidth. 8keV Cu target X-ray tube source was used in x-ray imaging experiments and the magnification of 1× and 2× X-ray images are obtained.
