Study on Mach-Zehnder Intensity Modulators of Poled DANS Polymer Electro-Optic Waveguides
M-Z型极化DANS聚合物电光波导强度调制器研究

The fabrication process of Mach-Zehnder modulators of poled polymer electro-optic waveguides has been developed. A DANS(4－dimethylamino－4′nitro-stlibene) polymer was selected as the electro-optic waveguide material. It was formed of five layers that consist of an electro-optic waveguide layer,two buffer layers and two metal electrode layers. The compatible properties of optics,chemistry and micro machining process among the layers were studied deeply. The channel waveguide with glazed sidewall was fabricated by using the ultraviolet photobleaching process. Then,by using the corona-poling setup with a tungsten wire electrode,the films were poled so that the waveguide had electro-optic property. Finally,by optimizing the fabrication process,the model device of M-Z type electro-optic intensity modulators working at 1300 nm wavelength has been developed. The half-wave voltage and modulation bandwidth of the device are about 10 V and 1 GHz,respectively.