Influences of Incidence Angle and Surface Characteristic of Thin Slice on Laser Interference Thermometry
入射角和薄片表面特性对激光干涉测温的影响

Based on laser interference theory, the mono-crystalline silicon slice with various surface optical characteristics and K-8 optical glass were studied.The contrast change of interference fringe impacting temperature measurement of these slices was researched.The contrast of interference fringe depended on measuring light beam,reference angle,surface roughness and surface coating film was analyzed.The transverse temperature gradient of these slices impacting the contrast of interference fringe was discussed.The result indicated that the method for laser interferometry can fulfil the condition for measuring accurately temperature of the slice surface with non-ideal in the condition of some contrast threshold.