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光子学报  2007 

Study of the Relationship Between Nonlinearity of CCD and Frequency Overlapping
CCD的非线性与频谱混叠的关系研究

Keywords: Fourier Transformation Profilometry (FTP),Nonlinearity of CCD,Overlapping spectrum,Sampling
傅里叶变换轮廓术(FTP)
,CCD的非线性,频谱混叠,抽样

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Abstract:

The overlapping spectrum caused by the nonlinearity of CCD was analyzed,and the way of reducing overlapping spectrum was presented.The cause to high order spectrum produced by the nonlinearity of CCD was analyzed through theory.The simple physical explain and analytical deduction was given,and also results of overlapping spectrum were given through simulation of computer and experiment.The results of simulation of computer show that the measurement precision of FTP can be improved obviously by denser sampling.

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