Errors Analysis of Interferometry and Accuracy Measurement for NC Machine Tools
干涉测量的误差分析与并联机床的准确度测量

The principle of linear measure of Renishaw laser interferometer was explored.Main factors and inducements of errors of the laser interferometer in measuring the precision of linear axis are analyzed.A curve of collimation error and a Abbe error camber in linear measure are devised,using least squares fitting method,the mathematical model of collimating measurement error for interferometer is established and Abbe error characteristic curvilinear equation along u and v orientation discretely is obtained.An error mathematic modeling method is presented.Precision of linear axis on Hybrid NC machine tools is measured by using a laser interferometer,in order to ready to compensate the errors of precision of movement on the hybrid NC machine tools.A interferometry method suited to measure location accuracy for linear axis of NC machine tool is proposed.