Basic Principles of Digital Simulation Shadow Moiré Profilometry and Its Experimental System
数字仿真形貌影栅云纹法及实验系统的原理

A digital simulation shadow moiré techniques is proposed that includes the auto-design of arrangements for shadow moiré instruments and the auto-production of shadow moiré fringe patterns by computer, based on the concept of the virtual shadow moiré field. A new experimental system of the digital simulation shadow moiré profilometry is also built up, which can not only be used to reconstruct profiles of object surface efficiently, but also be used as an error analysis and evaluation system. The parameters of several optical arrangement cases of the shadow moiré instruments were analyzed by using the experimental system. The key data of the arrangement parameters are provided, which play important roles in controlling the maximum original system relative error less than 5%. These data may be used for rationally designing shadow moiré instruments in the experimental system. The digital simulation shadow moiré profilometry proposed in this paper is helpful to promote the development and perfection of the whole shadow moiré profilometry.