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光子学报  2008 

Reflection Reducing Coating Composed of TiO2-SiO2 Multilayer Films Prepared Using Sol-Gel Processing
溶胶-凝胶法制备TiO2-SiO2多层增透膜

Keywords: Sol-gel,Reflection reducing coating,Coating-design,Transmitted spectrum,TiO2-SiO2 multilayer films
溶胶-凝胶法
,增透膜,膜系设计,透射光谱,TiO2-SiO2多层膜

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Abstract:

Titanic oxide sol and silicon dioxide sol are obtained by hydrolysis and co-condensation reactions occurred in acid-catalyzed system by carefully controlling the sol-gel process of tetrabutylorthotitanate and tetraethoxysilane (TEOS).They are coated on glass slides by dipping method.In virtue of the thin film designing software MASS,broadband reflection reducing coating composed of TiO2-SiO2 multilayer films have been prepared.The transmission spectrum of the simulation is 99%.The transmission spectra of the samples are characterized by ultraviolet-visible spectrophotometer.For the case of vertical incidence,the average transmission of the slide sample increases 5.5% compared to the uncoated one in the spectra range from 400 nm to 700 nm,for 45°incidence the increase is 10%.

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