Preparation of the TiO2 and Nb2O5 Mixed Optical Film
反应磁控溅射制备TiO2和Nb2O5混合光学薄膜

TiO2-Nb2O5 mixed optical film has been deposited on BK-7 substrate by the reactive magnetron sputtering technique. The microstructure,morphology,composition and optical properties have been investigated by X-ray diffraction,scanning electron microscopy,atomic force microscopy,X-ray photoelectron spectroscopy and spectrophotometer. The results show that the TiO2-Nb2O5 mixed film is amorphous and has optically flat and uniform surface. The structure of the film is compact and not column structures or defects can be observed,and the stoichiometric ratio of Nb2O5 to TiO2 is about 1.54.Refractive index and extinction coefficient of the film are determined from the normal incidence transmittance,and refractive index is 2.34 and extinction coefficient is 2.0 × 10－4 at 550 nm wavelength.These results indicate that the mixed film has high quality for optical applications.