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光子学报  2008 

Analysis of Far-field Optical Property of Bubble in Super-resolution Near-field Structure Disk
超分辨近场结构中Bubble微结构的远场光学特性分析

Keywords: Super-RENS,Gaussian diffraction model,Minute structural deformation,Far-field
超分辨近场结构(Super-RENS)
,高斯衍射模型,bubble微结构,远场

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Abstract:

Based on Fresnel-Kirchhoff diffraction theory, a Gaussian diffraction model of the bubble in the Super-RENS has been set up. Results show that the simplified model of the bubble forming process proposed in this letter can denote the structural deformation process of the mask layer in Super-RENS irradiated by a Gaussian beam. It indicates that Gaussian diffraction model is an effective method for analyzing the minute structural deformation in thin film and can give a better understanding of the far-field readout mechanism of bubble sructure.

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