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光子学报  2006 

Analysis and Test on Rotation Error Induced by the Micro-displacement of Phase-shifter
移相器微位移旋转误差的分析及测试

Keywords: Phase shifting interferometry (PSI),Virtual grating moiré fringe method,PZT phase-shifter
移相干涉术
,虚光栅叠栅条纹法,PZT移相器

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Abstract:

Based on the theory of linear polynomial fitting algorithm, the micro-displacement error of phase shifter which can induce the rotation of fringes in the processing of phase shift is analyzed. A novel method for static interferogram analysis, named the virtual grating phase-shifting moire fringe method that is based on virtual grating technology, phase-shifting interferometry and moire technology, is introduced and analyzed. When the static interferogram with a certain spatial frequency in the experiment is processed by this method, the phase shift is introduced mathematically and controlled by the computer to avoid any phase-shifting error, so the dynamic phase could he evaluated. Some valuable experiments are carried out and the results are presented to show the feasibility of this error-analysis method. In terms of error analysis, the criterions to control the error are presented.

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