Simulation Study of Robust Control System for Optical Phase-Shifting Interferometer Vibration Isolation System
光学移相干涉仪抗振系统的鲁棒控制系统仿真分析

The hybrid control technology of the active vibration isolation and the passive vibration isolation is presented to solve the uncertainty of the optical phase-shifting interferometer vibration isolation system.The active vibration isolation exploits the theory of Robust Control,which overcome the uncertainty of model and the disturbance,and make the control system restrain the uncertainty of the model and the disturbance of the vibration.The simulation results prove that this method has good robustness and control precision in the vibration isolation of the optical phase-shifting interferometer.