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光子学报  2008 

Femtosecond Single Pulse Laser Induced Damage of Single Layer and High-Reflective Coating
单脉冲飞秒脉冲激光对单层和高反光学薄膜的损伤

Keywords: Femtosecond pulse,Laser damage,Single layer,High-reflective coating,Ionization
飞秒激光
,激光诱导损伤,单层膜,高反膜,离化作用

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Abstract:

Single-shot laser-induced damage test was performed in air employing Ti:sapphire laser pulses with duration 50 fs,center wavelength 800 nm. ZrO2 single layer and ZrO2/SiO2 high-reflective (HR) coating served as targets, which were prepared by electron beam evaporation technology on BK7 glasses. It was found that the LIDT of the ZrO2 single layer was higher than ZrO2/SiO2 HR coating. A theoretical model based on conduction band electrons produced by photoionization and impact ionization was applied to discuss the phenomenon. Meanwhile, damage morphologies of the samples were observed by Leica optical microscopy to show the damage characters.

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