Three-component Hybrid-integrated Optical Acceleration Seismic Geophone Based on Photoelastic Waveguide
三分量光弹波导混合集成加速度传感器

In order to provide a high resolution wide band geophone for three-dimensional seismic geophone, the three-component hybrid-integrated optical acceleration seismic geophone is designed. Analysing the photoelastic effect of LiNbO_3 waveguide applied arbitrary-direction acceleration. The Mach-Zehnder interferometer is realized by symmetrical Y-branching waveguide,waveguide phase modulator and two waveguide polarizers, which are monolithically integrated on an X-cut, Y-propagating LiNbO_3 substrate. The results reveal that the accelerometer has wide band and good linearity. The main design parameters of the geophone system is as following: natural frequency:4300 Hz;phase detection sensitivity Δ/a: 1.81×10 -4 rad/m·s -2 ;work frequency range: 3~1506 Hz..