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光子学报  2006 

Analysis and Optimization of MSM-PD''''s Characteristics Using a Two Dimensional Numerical Method
MSM光探测器瞬态特性的二维分析及优化设计

Keywords: MSM photodetector,Finite difference method,2D,Transient response,Optimization,Si
MSM光探测器
,有限差分,二维分析,瞬态响应,优化设计,Si

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Abstract:

A 2D finite-difference method is developed to study a Metal-Semiconductor-Metal PhotoDetector (MSM-PD).The time-domain numerical simulation is based on the Poisson equation and continuity equations for electrons and holes.The transient response of the photodector is analyzed. An optimized design of MSM-PD is given to achieve a fast response while keeping a satisfactory responsivity.

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