STRUCTURE AND ANTICORROSION PROPERTY OF Ti (A1)N COATING PREPARED BY ION PLATING
离子镀Ti（Al）N涂层的结构与耐蚀性

Ti(Al)N coatings were prepared by the Hollow Cathode Discharge(HCD) ion plating technology. The measurement of the corrosion rate of the coating by anode polarization curve in 0.5 mol/L H 2SO 4 solution showed that the better anticorrosion property of Ti(Al)N coating than that of TiN coating. Analysis results of Electronic Probe Mass Analysis (EPMA), Scanning Electronic Microscope (SEM) and X ray diffraction revealed that Al was concentrated uniformly as a band at the interface between the coating and the substrate and compared with TiN coating, Ti(Al)N coating consisted of finer fibrous grains and distinct denser columnar grains. Meanwhile the effect of the structure on the anticorrosion property is discussed.