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OALib Journal期刊
ISSN: 2333-9721
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OXIDATION BEHAVIOR OF SPUTTERED NiCrAl MICROCRYSTALLINE COATING
溅射NiCrAl微晶涂层的氧化行为

Keywords: sputtering,NiCrAl,microcrystal,oxidation
溅射
,微晶,氧化,涂层,氧化腐蚀,腐蚀

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Abstract:

The effect of Ar pressure on grain sizes of sputtered Ni 20Cr 2Al coating was investigated. The results indicated that the grain sizes reduced with decreasing Ar pressure. When Ar pressure was 0.67 Pa, the grain size of coating was about 65 nm and a pure continuous Al 2O 3 scale was formed on this coating as a result of grain boundary diffusion of aluminum.

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