Autocontrol Technology of Optical Thin-film Manufacture Based on In-situ Broadband Optical Monitor
基于宽光谱监控的光学薄膜自动控制技术

It is hard to precisely control optical characteristic of thin film in wide band using the single wavelength monitor due to the material dispersion, monitoring precision and something else. Broadband monitor can monitor optical characteristic for wide band, therefore it is convenient and precise. However while the thought of broadband monitor had been brought forward, practicability of this kind monitor is low. Recently, with the development of electronics technology and computer technology, make it possible to develop high performance broadband monitor. A new broadband monitor is developed using linear CCD as detector, it can do spectrum scanning very quickly. System can achieve high measuring precision, working with advanced optical thin film coating program, system can fulfill the requirement for automatic control based on broadband monitor.