APPLICATION AND ERROR ANALYSIS OF MICROMAGNITUDE MEASUREMENT WITH LINEAR CCD
线阵CCD微小尺寸测量的应用及误差分析

The linear CCD can be applied in one-dimensional untouchable micromagnitude measurement.The basic procedure of this method is establishing the function relation between the diffracted size of measured object and the CCD video signal to measure precisely the micromagnitude.Besides,the error of this measurement method is analyzed.