EQUIVALENT ELECTRICAL SIMULATION OF MICROMACHINED GYROSCOPE''''S OSCILLATING PROPERTIES
微机械陀螺振动特性的等效电学模拟

An equivalent circuit model of micromachined gyroscope's oscillating properties is derived according to its dynamics equation. The model is implemented with the circuit simulation tool PSPICE, and can be used to analyse oscillating properties, including the detection mode transient response, stable response and frequency response to angular rate. Thus the optimizing conditions can be gotten. And also the model enables the sensor to simulate together with the interfacing electronics.